Understanding the impact of heavy ions and tailoring the optical properties of large-area monolayer WS2 using focused ion beam
Abstract Focused ion beam (FIB) is an effective tool for precise nanoscale fabrication.It has recently been employed to tailor defect engineering in functional nanomaterials such as two-dimensional Drone transition metal dichalcogenides (TMDCs), providing desirable properties in TMDC-based optoelectronic devices.However, the damage caused by the FI